Master of Science [M.S] [Nanoscale Science - Nanoscale Materials Characterization, Analysis, and Metrology] From State University of New York Polytechnic Institute

This track focuses on advanced nanoscale photon, ion, and electron based microscopic and spectroscopic analytical techniques and process metrologies for atomic and molecular-level material properties of ultra-thin films, nanomaterials and nanoscale devices and systems. The functionality and reliability of these structures depend on the ability to control dimensions and chemistry with high precision; techniques for measuring and analyzing them must have similar or better precision. This track therefore focuses on both practical aspects of measurement science and fundamental limits based on basic physical and chemical principles.